Spare Parts — Semiconductor Equipment Parts Catalog

TEMPER ATUER CONTROLLER

Conductor

Drive Motor Unit

TokyoElectron CPU-88C(TEL)

HALL PROBE INTERFACE(EATON NOVA / AXCELIS )

CHILLER(RISSHI)

CHILLER(SMC)

WJ 12' Shild N2

CPU BD

I/O BD

PRESSURE SENSER SWITCH GAUGE (ZT15-236)

KEY BOARD VER2

（San Ace 92 MODEL:109S091） SANYO DENKI

TAPE 650S-25 250*20

TUBE,FLEX VA0143-04

TUBE CONNECTION HE

SENSER PC,PC1 BMT PT

Cap,Electrical FeedThough

PCB, ASSY HEATER FILTER

PCB, ANALOG OUT W/JUMPER

ANALOG BD

MOT,PMDC,42C,1/4HP,W/ENCD

PWR SPLY,T12/-12,1500W

POWER-ONE

POWER SUPPLY