EBARA Spare Parts — Semiconductor Equipment Parts Catalog

Ebara Dry PUMP(S/N:M40047)

JOINT BELLOWS MODEL LOT OF THREE

CORPORATION ESR20N DRY PUMP /200V 60/50HZ 10.8A 2000L/MIN

VALVE INTEGRATION SYSTEM C- NEW

PLATE GUIDE HARD PLASTIC C C- LOT OF 4

TECH BELLOWS M/J RUBBER LOT OF 12 NEW

TECH BELLOWS UPPER ROLL

ROLLER LARGE CLEANER NEW

COVER, CL (1), , NEW

SENSOR PROXIMITY CABLE, C-

MULTI PROCESS MONITOR FROM FREX-300S CMP, USED AS IS

TURBO MOLECULAR PUMP CONTROLLER 100-200W 50/60 HZ

RELAY CONNECTOR WITH CABLE, P/N:

SHAFT CHUNK P/N:

SWITCH LIMIT D4F-/E42933 AWM 2464 22AWG VW-1SC CABLE

GENESIS VACUUM TECHNOLOGIES ICP 200 LQ CRYOGENIC PUMP

COMPUTER FOR FREX 300MM CMP, USED

USED

RUBBER PLATE,

RING SUB GT2

CYLINDER WITH GUIDE D20X100 T02 CYLINDER

TURBO PUMP CONTROLLER

DISSOLVER CARBON DIOXIDE MODULE NEW

COLD TRAP CRYOPUMP

CLEANER MODULE ONLY, LOT OF 2 (PARTS MACHINE)