Spare Parts — Semiconductor Equipment Parts Catalog
PRESSURE SENSER SWITCH GAUGE (ZT15-236)
TEL
KEY BOARD VER2
TEL
TAPE 650S-25 250*20
TEL
TUBE,FLEX VA0143-04
TEL
TUBE CONNECTION HE
SENSER PC,PC1 BMT PT
BERAING SSR-1450ZZ
BERAING SSR-1450ZZ
Tape Heater
Tokyo Electron
DC/DC COV #06 Board PCB PCMK-G3X
Tokyo Electron
EXT DIO BOARD PCB SP001
Tokyo Electron
LIMITED WAFER FORK (CRA-05) ASSY
Tokyo Electron
LIMITED WAFER FORK (IRA) ASSY
Tokyo Electron
PBM603DCC22 TOKYO ELECTRON 2L86-057342-12 MOTOR
Tokyo Electron
VALVE RESIN
Tokyo Electron
VALVE RESIN
Tokyo Electron
FORK PRA FOR TEL 300MM WAFER PRA PROCESS BLOCK
SHIELD DEPO (Telius SP SCCM Oxide JIN 300mm)
SHUTTER,BTM Y-AL (Telius SP SCCM Oxide JIN 300mm)
CEL,OX T10-75-C912COC-N (Telius SP SCCM Oxide JIN 300mm)
PLATE,EXHAUST Y-AL,SE (Telius SP SCCM Oxide JIN 300mm)
INSULATOR LOWER (Telius SP SCCM Oxide JIN 300mm)
Focus Ring 360-302-C (Telius SP SCCM Oxide JIN 300mm)
COVER RING 360.9 (Telius SP SCCM Oxide JIN 300mm)
COVER RING 360.9 (Telius SP SCCM Oxide JIN 300mm)